JPS647499B2 - - Google Patents

Info

Publication number
JPS647499B2
JPS647499B2 JP16132881A JP16132881A JPS647499B2 JP S647499 B2 JPS647499 B2 JP S647499B2 JP 16132881 A JP16132881 A JP 16132881A JP 16132881 A JP16132881 A JP 16132881A JP S647499 B2 JPS647499 B2 JP S647499B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
electrode
metal film
semiconductor device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16132881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5861650A (ja
Inventor
Tooru Masaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16132881A priority Critical patent/JPS5861650A/ja
Publication of JPS5861650A publication Critical patent/JPS5861650A/ja
Publication of JPS647499B2 publication Critical patent/JPS647499B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16132881A 1981-10-09 1981-10-09 半導体装置 Granted JPS5861650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16132881A JPS5861650A (ja) 1981-10-09 1981-10-09 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16132881A JPS5861650A (ja) 1981-10-09 1981-10-09 半導体装置

Publications (2)

Publication Number Publication Date
JPS5861650A JPS5861650A (ja) 1983-04-12
JPS647499B2 true JPS647499B2 (en]) 1989-02-09

Family

ID=15732992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16132881A Granted JPS5861650A (ja) 1981-10-09 1981-10-09 半導体装置

Country Status (1)

Country Link
JP (1) JPS5861650A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01175096U (en]) * 1988-05-30 1989-12-13

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558814B2 (en]) * 1972-05-24 1980-03-06
JPS5066187A (en]) * 1973-10-12 1975-06-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01175096U (en]) * 1988-05-30 1989-12-13

Also Published As

Publication number Publication date
JPS5861650A (ja) 1983-04-12

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